Thin films formed on substrates show various crystal phase and orientations depending on the materials and
manufacturing method. Therefore, phase identification is sometimes difficult by ordinary X-ray diffraction
(XRD) measurement. The diffraction image using a two-dimensional (2D) detector reveals the lattice constant
and the orientation for each crystal phase readily because the diffraction intensity distribution in the 2θ
direction and the distribution of the crystal orientation in the χ direction are observed simultaneously.